Vertical field inhomogeneity associated with threading dislocations in GaN high electron mobility transistor epitaxial stacks

نویسندگان

چکیده

A measurement technique combining Kelvin-probe force microscopy with substrate bias is developed and demonstrated on AlGaN/GaN-on-Si device structures under conditions relevant to the effect of off-state drain stress in transistors. For a high bias, measurements show significantly lowered surface potential surrounding small proportion dislocations imaged atomic (AFM), laterally extending scale up micrometer. Both density size those features increase bias; however, conductive AFM same showed no leakage reaching associated features. Our model considers localized paths that end certain distance below 2D electron gas electrically “thinning” epitaxy and, therefore, deforming increasing electric field bias. The conclusion vertical buffer highly non-uniform an enhanced vicinity dislocations. This non-uniformity redirects from channel consequences for breakdown.

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ژورنال

عنوان ژورنال: Applied Physics Letters

سال: 2021

ISSN: ['1520-8842', '0003-6951', '1077-3118']

DOI: https://doi.org/10.1063/5.0066346